JEOL developed the JEM-ARM300F, a 300 kV atomic resolution transmission electron microscope featuring JEOL's own aberration correctors as an enhanced model of the JEM-ARM200F.
Nicknamed GRAND ARM, the JEM-ARM300F, incorporates JEOL's propriety dodecapole correctors, successfully increasing the resolution level to 63 pm (STEM resolution).
The GRAND ARM can be configured for ultra high resolution imaging or analytical applications for high sensitivity and in-situ analysis according to the user's needs.
The system is primarily intended for public and private research institutes and semiconductor manufacturers.
Accelerating voltage | Maximum 300 kV |
TEM lattice resolution | 0.05 nm (with spherical aberration corrector |
STEM resolution | 0.063 nm (spherical aberration corrector |
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Subject to technical changes; errors excepted. All brand names that appear in the text are registered trademarks of the manufacturers.